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1. Identity statement
Reference TypeJournal Article
Sitemtc-m21c.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W34R/3UM9JH2
Repositorysid.inpe.br/mtc-m21c/2020/01.02.14.15   (restricted access)
Last Update2020:01.02.14.15.12 (UTC) simone
Metadata Repositorysid.inpe.br/mtc-m21c/2020/01.02.14.15.12
Metadata Last Update2022:01.04.01.34.54 (UTC) administrator
DOI10.1016/j.tsf.2019.137703
ISSN0040-6090
Citation KeyMarianoUeda:2020:GlCaFi
TitleGlass-like carbon films grown by pulsed hollow cathode via plasmaimmersion ion implantation and deposition
Year2020
MonthJan.
Access Date2024, May 20
Type of Workjournal article
Secondary TypePRE PI
Number of Files1
Size1703 KiB
2. Context
Author1 Mariano, Samantha de Fátima Magalhães
2 Ueda, Mário
Resume Identifier1
2 8JMKD3MGP5W/3C9JHSB
Group1 LABAP-COCTE-INPE-MCTIC-GOV-BR
2 LABAP-COCTE-INPE-MCTIC-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
Author e-Mail Address1 samanthafmm@outlook.com
2 mario.ueda@inpe.br
JournalThin Solid Films
Volume693
Pagese137703
Secondary MarkA1_ENGENHARIAS_IV A1_ENGENHARIAS_II A2_MATERIAIS A2_INTERDISCIPLINAR A2_ENGENHARIAS_III B1_MEDICINA_II B1_CIÊNCIA_DE_ALIMENTOS B2_QUÍMICA B2_CIÊNCIAS_BIOLÓGICAS_II B2_CIÊNCIAS_BIOLÓGICAS_I B2_BIOTECNOLOGIA B2_ASTRONOMIA_/_FÍSICA B5_ENSINO
History (UTC)2020-01-02 14:15:12 :: simone -> administrator ::
2020-01-02 14:15:12 :: administrator -> simone :: 2019
2020-01-02 14:15:32 :: simone :: 2019 -> 2020
2020-01-02 14:15:32 :: simone -> administrator :: 2020
2020-01-05 05:40:13 :: administrator -> simone :: 2020
2020-05-30 17:39:09 :: simone -> administrator :: 2020
2022-01-04 01:34:54 :: administrator -> simone :: 2020
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
KeywordsHollow cathode discharge
Plasma immersion ion implantation and deposition
Diamond-like carbon
Glass-like carbon
Nanostructured carbon films
Thin films
AbstractPlasma Immersion Ion Implantation and Deposition (PIII&D) systems based on pulsed metal tubes are a very promising technique to deposit diamond-like carbon and correlated thin films. A hollow cathode plasma can be appropriately used to locally deposit glass-like carbon films on small substrates by means of PIII&D. The morphology, microstructure, roughness as well as the investigation of the chemical structure of the as-deposited graphitic films outside the pulsed tube are reported. By the described PIII&D setup, the power of the discharge plasma can be properly adjusted to produce a range of disordered carbon films. But their structures are not so extensively changed since high temperatures (around 900 degrees C) are inherent in these conditions. Furthermore, there is a minimum power required to sustain the hollow cathode discharge when small tubes are used. Moreover, an additional effect caused by the intense bombardment of secondary electrons outside the tube can account for the growing of more ordered and rougher graphitic carbon coatings. We have then found that those nanostructured glass-like carbon films are strongly dependent on the power of the produced plasma that impinges on the substrate surface increasing its temperature.
AreaFISPLASMA
Arrangementurlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Glass-like carbon films...
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4. Conditions of access and use
Languageen
Target Filemariano_glass.pdf
User Groupsimone
Reader Groupadministrator
simone
Visibilityshown
Archiving Policydenypublisher denyfinaldraft24
Read Permissiondeny from all and allow from 150.163
Update Permissionnot transferred
5. Allied materials
Next Higher Units8JMKD3MGPCW/3ET2RFS
Citing Item Listsid.inpe.br/bibdigital/2013/09.25.21.49 3
sid.inpe.br/mtc-m21/2012/07.13.14.56.06 1
DisseminationWEBSCI; PORTALCAPES.
Host Collectionurlib.net/www/2017/11.22.19.04
6. Notes
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